A User s Guide to Vacuum Technology

A User s Guide to Vacuum Technology

In the decade and a half since the publication of the Second Edition of A User?s Guide to Vacuum Technology there have been many important advances in the field, including spinning rotor gauges, dry mechanical pumps, magnetically levitated ...

Author: John F. O'Hanlon

Publisher: John Wiley & Sons

ISBN: 9780471467151

Category: Science

Page: 536

View: 260

In the decade and a half since the publication of the Second Edition of A User?s Guide to Vacuum Technology there have been many important advances in the field, including spinning rotor gauges, dry mechanical pumps, magnetically levitated turbo pumps, and ultraclean system designs. These, along with improved cleaning and assembly techniques have made contamination-free manufacturing a reality. Designed to bridge the gap in both knowledge and training between designers and end users of vacuum equipment, the Third Edition offers a practical perspective on today?s vacuum technology. With a focus on the operation, understanding, and selection of equipment for industrial processes used in semiconductor, optics, packaging, and related coating technologies, A User?s Guide to Vacuum Technology, Third Edition provides a detailed treatment of this important field. While emphasizing the fundamentals and touching on significant topics not adequately covered elsewhere, the text avoids topics not relevant to the typical user.
Categories: Science

A User s Guide to Vacuum Technology

A User s Guide to Vacuum Technology

This 2nd Edition has new information on components, lubrication, pump fluids, and other materials. Basic characteristics and operational procedures are given for each high-vacuum pumping system.

Author: John F. O'Hanlon

Publisher: Wiley-Interscience

ISBN: 0471812420

Category: Technology & Engineering

Page: 512

View: 131

An introduction to the theory and practice of modern vacuum technology, with applications. Focuses on the understanding, operation, and selection of equipment for vacuum processes used in semiconductor, optical, and related technologies. This 2nd Edition has new information on components, lubrication, pump fluids, and other materials. Basic characteristics and operational procedures are given for each high-vacuum pumping system.
Categories: Technology & Engineering

High Vacuum Technology

High Vacuum Technology

Offering a basic understanding of each important topic in vacuum science and technology, this book concentrates on pumping issues, emphasizes the behavior of vacuum pumps and vacuum systems, and explains the relationships between pumps, ...

Author: Marsbed H. Hablanian

Publisher: Routledge

ISBN: 9781351440684

Category: Science

Page: 568

View: 398

Offering a basic understanding of each important topic in vacuum science and technology, this book concentrates on pumping issues, emphasizes the behavior of vacuum pumps and vacuum systems, and explains the relationships between pumps, instrumentation and high-vacuum system performance. The book delineates the technical and theoretical aspects of the subject without getting in too deep. It leads readers through the subtleties of vacuum technology without using a dissertation on mathematics to get them there. An interesting blend of easy-to-understand technician-level information combined with engineering data and formulae, the book provides a non-analytical introduction to high vacuum technology.
Categories: Science

High vacuum Technology

High vacuum Technology

Author: M. H. Hablanian

Publisher: Marcel Dekker Incorporated

ISBN: UOM:39015020764703

Category: Technology & Engineering

Page: 410

View: 193

Categories: Technology & Engineering

Pumps Used in Vacuum Technology

Pumps Used in Vacuum Technology

14 , Vacuum Physics and Technology , edited by G . L . Weissler and R . W .
Carlson , Academic Press ( 1979 ) , New York , Chapter 4 . 1 by M . H . Hablanian
Section 4 , " Oil Sealed Rotary Pumps " - “ A Users Guide To Vacuum Technology
” ...

Author: Harland G. Tompkins

Publisher:

ISBN: UVA:X002159386

Category: Ejector pumps

Page: 57

View: 141

Categories: Ejector pumps

Handbook of Electron Tube and Vacuum Techniques

Handbook of Electron Tube and Vacuum Techniques

Author: Fred Rosebury

Publisher: American Institute of Physics

ISBN: 9781563961212

Category: Science

Page: 600

View: 886

Market: Students and researchers in space and high-vacuum technology and materials science. This handbook was originally prepared so that workers would not have to consult a great many sources to learn what procedures and materials were used to construct tubes and other evacuated devices. Even now, as space and high-vacuum research are yielding new information daily, much of the subject matter in this seminal work, such as properties of materials, are as cogent as they were in 1964 when the book was first published.
Categories: Science

Introduction to Vacuum Technology

Introduction to Vacuum Technology

Failure of the vacuum system to pump down to base pressure can be caused by
leaks , failure to close a manual vent valve , or the failure of an ... A User's Guide
to Vacuum Technology , 3rd Edition , Wiley Interscience , Hoboken , NJ , 2003 .

Author: David M. Hata

Publisher: Prentice Hall

ISBN: PSU:000060628435

Category: Technology & Engineering

Page: 187

View: 343

The approach taken in this book is to approach vacuum systems from a pressure regime viewpoint. That is, after covering some basic chemistry, the first pressure regime covered is the rough vacuum regime. Within the study of rough vacuum systems, the following topics are covered: the gas load, the pumping mechanism, pressure measurement and vacuum system construction. The discussion of rough vacuum is then followed by the study of high-vacuum systems. The same topics are revisited, but this time from a high vacuum perspective. Once both rough vacuum and high vacuum systems are covered, then the topics of leak detection and residual gas analysis are introduced. This approach lends itself to laboratory experimentation. During the review of gas laws from chemistry, there are a number of experiments and demonstrations that can be performed to reinforce basic laws and concepts. Then, during the study of rough vacuum systems, pumpdown times can be calculated and pumpdowns performed in the laboratory. Likewise, during the study of high-vacuum systems, pumpdowns as well as other lab exercises, such as outgassing and residual gas analysis, can be conducted. Coverage of vacuum systems from a pressure regime viewpoint, rather than from a topical viewpoint. Focus on the fundamental science behind vacumm system components. This book is written for users of vacuum systems, especially the technicians that are responsible for maintaining them.
Categories: Technology & Engineering

InTech

InTech

Subjects covered include theoretical foundations of drying technology , heat and
mass transfer A User's Guide to Vacuum Technology , John F O'Hanlon , 402 pp ,
$ 24.95 . John Wiley & Sons Inc , 605 Third Ave , New York NY 10016 .

Author:

Publisher:

ISBN: UIUC:30112007888305

Category: Engineering instruments

Page:

View: 805

Categories: Engineering instruments

Vacuum Technology

Vacuum Technology

Aimed at newcomers, students and the experienced practitioner, this book is an accessible and applicable guide to quantitative problem solving in vacuum technology.

Author: D. J. Hucknall

Publisher: Royal Society of Chemistry

ISBN: 0854046518

Category: Science

Page: 233

View: 902

Aimed at newcomers, students and the experienced practitioner, this book is an accessible and applicable guide to quantitative problem solving in vacuum technology.
Categories: Science

Encyclopedia of Physical Science and Technology

Encyclopedia of Physical Science and Technology

A User's Guide to Vacuum Technology , " 2nd ed . , Wiley , New York . Ponec , V. ,
Knor , Z. , and Cerny , S. ( 1974 ) . “ Adsorption on Solids , ” Butterworth , London ,
Pupp , W. ( 1972 ) . “ Vakuumtechnik , Grundlagen und Anwendungen ...

Author: Robert Allen Meyers

Publisher:

ISBN: 012227427X

Category: Physical sciences

Page: 1028

View: 907

Following in the footsteps of the earlier editions, hundreds of the most respected scientists and engineers participated in the creation of this new edition, including many Nobel Laureates. The articles are in-depth, yet accessible, and address all of the key areas of physical science--including aeronautics, astronomy, chemistry, communications, computers, earth sciences, electronics, engineering, materials science, mathematics, nuclear technology, physics, power systems, propulsion, and space technology. (Midwest).
Categories: Physical sciences

2002 International Symposium on Microelectronics

2002 International Symposium on Microelectronics

65, 1993. [8] Rajeshuni Ramesham, "Nonevaporable Getters To Maintain
Vacuum in Sealed MEMS", NASA Tech Brief, Vol. 25, pp. 1-9, February, 2000. [9]
John F. O'Hanlon, "A User's Guide to Vacuum Technology", John Wiley and Sons
, New ...

Author: Richard Charbonneau

Publisher:

ISBN: 0819447269

Category: Electronic ceramics

Page: 957

View: 764

Categories: Electronic ceramics

McGraw Hill Encyclopedia of Science Technology

McGraw Hill Encyclopedia of Science   Technology

Vacuum Technology , 2d ed . , 1983 ; J . F . O ' Hanlon , A Users Guide to
Vacuum Technology , 2d ed . , 1989 ; A . Roth , Vacuum Technology , 2d ed . ,
1982 ; M . Wutz , H . Adam , and W . Walcher , Theory and Practice of Vacuum
Technology ...

Author: Sybil P. Parker

Publisher: McGraw-Hill Companies

ISBN: UOM:39015024956925

Category: Science

Page: 20

View: 527

Categories: Science

McGraw Hill Encyclopedia of Science Technology

McGraw Hill Encyclopedia of Science   Technology

See Vacuum measurement. Richard Comeau Bibliography. W. F. Brunner, Jr.,
and T. H. Batzer, Practical Vacuum Techniques, 1965, reprint 1974; J. F. O'
Hanlon, A Users Guide to Vacuum Technology, 1980; H. A. Steinherz, Handbook
of High ...

Author:

Publisher:

ISBN: MINN:319510006992925

Category: Science

Page:

View: 222

Categories: Science

Vacuum Technique

Vacuum Technique

Vacuum Technique provides an overview of vacuum technology, its different design methodologies, and the underlying theory.

Author: L.N. Rozanov

Publisher: CRC Press

ISBN: 041527351X

Category: Science

Page: 360

View: 750

Vacuum technology finds itself in many areas of industry and research. These include materials handling, packaging, gas sampling, filtration, degassing of oils and metals, thin-film coating, electron microscopy, particle acceleration, and impregnation of electrical components. It is vital to design systems that are appropriate to the application, and with so many potential solutions this can become overwhelming. Vacuum Technique provides an overview of vacuum technology, its different design methodologies, and the underlying theory. The author begins with a summary of the properties of low-pressure gases, then moves on to describe mathematical modeling of gas transfer in the vacuum system, the operation of pumps and gauges, computer-aided synthesis and analysis of systems, and the design of different vacuum systems. In particular, the author discusses the structure and characteristics of low, middle, high, and superhigh vacuum systems, as well as the characteristics of joints, materials, movement inputs, and all aspects of production technology and construction standards. Using specific examples rather than describing the various elements, Vacuum Technique supplies engineers, technicians, researchers, and students with needed expertise and a comprehensive guide to designing, selecting, and using an appropriate vacuum system for a specific purpose.
Categories: Science

Solid State Technology

Solid State Technology

Industrial Hygiene Manual , ” Occupational Safety and Health Administration ,
U.S. Government Printing Office ( 1984 ) . 2 . N.A. Leidel , K.A. ... J.F. O'Hanlon , “
A User's Guide to Vacuum Technology , " John Wiley & Sons , New York , NY , p .

Author:

Publisher:

ISBN: UCSD:31822008596504

Category: Semiconductors

Page:

View: 438

Categories: Semiconductors

Semiconductor Materials and Process Technology Handbook

Semiconductor Materials and Process Technology Handbook

R. Glang , R.A. Holmwood , and J.R. Kurtz in Handbook of Thin Film Technology ,
L.I. Maissel and R. Glang ed . , McGraw - Hill , New York ( 1970 ) pp . 2-1 to 2-142
. 2. J.F. O'Hanlon , A User's Guide to Vacuum Technology , Wiley , New York ...

Author: Gary F. McGuire

Publisher: William Andrew

ISBN: UOM:39015012771450

Category: Science

Page: 675

View: 285

A broad review of semiconductor materials and process technology with emphasis on VLSI and ULSI.
Categories: Science

Instruments of Amplification

Instruments of Amplification

... high2.html " High Pressure and Vacuum - Vacuum Measurement , " copyright
2000 , Omega Engineering , Inc. http://www.industrysearch.com.au/features/
vacuum.asp " Vacuum Science : A User's Guide to Vacuum Technology , "
copyright ...

Author:

Publisher: Peter H Friedeichs

ISBN: PSU:000060770417

Category: Amplifiers (Electronics)

Page: 297

View: 384

Categories: Amplifiers (Electronics)

Vacuum Technology

Vacuum Technology

A guide for furnace operators, metallurgists, and plant engineers working with vacuum processing, providing both a broad overview of the field and practical help with details and problems.

Author: Roger Fabian

Publisher: Asm International

ISBN: UOM:39015033134746

Category: Technology & Engineering

Page: 253

View: 352

A guide for furnace operators, metallurgists, and plant engineers working with vacuum processing, providing both a broad overview of the field and practical help with details and problems. Considers the basic theory, equipment, preparation and handling, process variables, commercial practice, inspec
Categories: Technology & Engineering

Wafer level Packaging and Frequency Trimming by Localized Mass Deposition

Wafer level Packaging and Frequency Trimming by Localized Mass Deposition

[ 4.4 ] G.F.Weston , Ultrahigh Vacuum Practice , Butterworths & Co. , 1985 . [ 4.5 ]
J. F. O'Hanlon , A User's Guide to Vacuum Technology , John Wiley & Sons , New
York , 1980 . [ 4.6 ] J.E. Shelby , “ Helium , deuterium , and neon migration in a ...

Author: Patty Pei-Ling Chang-Chien

Publisher:

ISBN: UOM:39015055166832

Category: Electrical engineering

Page:

View: 520

Categories: Electrical engineering

Electrothermally Actuated Polymer Microvalves

Electrothermally Actuated Polymer Microvalves

[ 59 ] K. W. Childs , “ Heating 7.2 user's manual , ” Computing Applications
Division , Oak Ridge National Laboratory , Feb 1993 . [ 60 ] F. P. Incropera and ...
[ 63 ] J. F. O'Hanlon , A User's Guide to Vacuum Technology . John Wiley & Sons ,
New ...

Author: Edwin Thomas Carlen

Publisher:

ISBN: UOM:39015050824757

Category:

Page:

View: 672

Categories: