Handbook of Deposition Technologies for Films and Coatings

Science, Applications and Technology

Author: Peter M. Martin

Publisher: William Andrew

ISBN: 0815520328

Category: Technology & Engineering

Page: 936

View: 8646

This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. Extensive material was added throughout the book, especially in the areas concerned with plasma-assisted vapor deposition processes and metallurgical coating applications. * Explains in depth the many recent i
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Handbook of Deposition Technologies for Films and Coatings

Science, Technology, and Applications

Author: Rointan Framroze Bunshah

Publisher: William Andrew

ISBN: 0815513372

Category: Reference

Page: 861

View: 1125

This second edition, edited by the world-renowned Dr. Rointain Bunshah, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. Considerably more material was added in Plasma Assisted Vapor Deposition processes, as well as Metallurgical Coating Applications.
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Handbook of Deposition Technologies for Films and Coatings, 2nd Ed.

Science, Applications and Technology

Author: Rointan F. Bunshah

Publisher: William Andrew

ISBN: 0815517467

Category: Technology & Engineering

Page: 887

View: 1807

This second edition, edited by the world-renowned Dr. Rointain Bunshah, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. Considerably more material was added in Plasma Assisted Vapor Deposition processes, as well as Metallurgical Coating Applications.
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Handbook of Sputter Deposition Technology

Fundamentals and Applications for Functional Thin Films, Nano-materials and MEMS

Author: Kiyotaka Wasa,Isaku Kanno,Hidetoshi Kotera

Publisher: William Andrew

ISBN: 1437734839

Category: Science

Page: 644

View: 6992

Sputtering is a Physical Vapor Deposition vacuum process used to deposit very thin films onto a substrate for a wide variety of commercial and scientific purposes. Sputtering occurs when an ionized gas molecule is used to displace atoms of a specific material. These atoms then bond at the atomic level to a substrate and create a thin film. Several types of sputtering processes exist, including: ion beam, diode, and magnetron sputtering. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallic coatings. High temperature, diamond films and ferroelectric materials are other applications. Sputtering applications are important across a wide range of industries, including the automotive, medical, semiconductors, space, plastics, and military sectors. A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available. All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique. 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere.
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Handbook of Hard Coatings

Deposition Technolgies, Properties and Applications

Author: Rointan F. Bunshah,Christian Weissmantel

Publisher: Cambridge University Press

ISBN: 9780815514381

Category: Science

Page: 550

View: 8737

Written by 12 leading experts, this is an essential resource for fabrication, characterization and applications in the field of hard coatings and wear resistant surfaces. Offering complete explanations of commercially oriented deposition technology, from traditional vacuum. Includes a detailed introduction to the science of characterizing and measuring hard coatings.
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Handbook of Thin Film Deposition

Author: Krishna Seshan

Publisher: William Andrew

ISBN: 1437778747

Category: Technology & Engineering

Page: 408

View: 2924

The Handbook of Thin Film Deposition is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory applications and methods for thin film optical processes. In a major restructuring, this edition of the handbook lays the foundations with an up-to-date treatment of lithography, contamination and yield management, and reliability of thin films. The established physical and chemical deposition processes and technologies are then covered, the last section of the book being devoted to more recent technological developments such as microelectromechanical systems, photovoltaic applications, digital cameras, CCD arrays, and optical thin films. A practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance and applications Covers core processes and applications in the semiconductor industry and new developments in the photovoltaic and optical thin film industries The new edition takes covers the transition taking place in the semiconductor world from Al/SiO2 to copper interconnects with low-k dielectrics Written by acknowledged industry experts from key companies in the semiconductor industry including Intel and IBM Foreword by Gordon E. Moore, co-founder of Intel and formulator of the renowned ‘Moore’s Law’ relating to the technology development cycle in the semiconductor industry
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Handbook of Industrial Refractories Technology

Principles, Types, Properties and Applications

Author: Stephen Caniglia,Gordon L. Barna

Publisher: William Andrew

ISBN: 0815517564

Category: Technology & Engineering

Page: 650

View: 1416

Encompasses the entire range of industrial refractory materials and forms: properties and their measurement, applications, manufacturing, installation and maintenance techniques, quality assurance, and statistical process control.
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Semiconductor Manufacturing Handbook, Second Edition

Author: Hwaiyu Geng

Publisher: McGraw Hill Professional

ISBN: 1259583120

Category: Technology & Engineering

Page: 704

View: 8563

Thoroughly Revised, State-of-the-Art Semiconductor Design, Manufacturing, and Operations Information Written by 70 international experts and reviewed by a seasoned technical advisory board, this fully updated resource clearly explains the cutting-edge processes used in the design and fabrication of IC chips, MEMS, sensors, and other electronic devices. Semiconductor Manufacturing Handbook, Second Edition, covers the emerging technologies that enable the Internet of Things, the Industrial Internet of Things, data analytics, artificial intelligence, augmented reality, and and smart manufacturing. You will get complete details on semiconductor fundamentals, front- and back-end processes, nanotechnology, photovoltaics, gases and chemicals, fab yield, and operations and facilities. •Nanotechnology and microsystems manufacturing •FinFET and nanoscale silicide formation •Physical design for high-performance, low-power 3D circuits •Epitaxi, anneals, RTP, and oxidation •Microlithography, etching, and ion implantations •Physical, chemical, electrochemical, and atomic layer vapor deposition •Chemical mechanical planarization •Atomic force metrology •Packaging, bonding, and interconnects •Flexible hybrid electronics •Flat-panel,flexible display electronics, and photovoltaics •Gas distribution systems •Ultrapure water and filtration •Process chemicals handling and abatement •Chemical and slurry handling systems •Yield management, CIM, and factory automation •Manufacturing execution systems •Advanced process control •Airborne molecular contamination •ESD controls in clean-room environments •Vacuum systems and RF plasma systems •IC manufacturing parts cleaning technology •Vibration and noise design •And much more
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Handbook of sol-gel science and technology. 3. Applications of sol-gel technology

Author: Sumio Sakka

Publisher: Springer Science & Business Media

ISBN: 9781402079689

Category: Ceramic materials

Page: 791

View: 9295

Since Dr. Disiich of Germany prepared a glass lens by the sol-gel method around 1970, sol-gel science and technology has continued to develop. Since then this field has seen remarkable technical developments as well as a broadening of the applications of sol-gel science and technology. There is a growing need for a comprehensive reference that treats both the fundamentals and the applications, and this is the aim of "Handbook of Sol-Gel Science and Technology."The primary purpose of sol-gel science and technology is to produce materials, active and non-active including optical, electronic, chemical, sensor, bio- and structural materials. This means that sol-gel science and technology is related to all kinds of manufacturing industries. Thus Volume 1, "Sol-Gel Processing," is devoted to general aspects of processing. Newly developed materials such as organic-inorganic hybrids, photonic crystals, ferroelectric coatings, photocatalysts will be covered. Topics in this volume include: Volume 2, "Characterization of Sol-Gel Materials and Products, "highlights the important fact that useful materials are only produced when characterization is tied to processing. Furthermore, characterization is essential to the understanding of nanostructured materials, and sol-gel technology is a most important technology in this new field. Since nanomaterials display their functional property based on their nano- and micro-structure, "characterization" is very important. Topics found in Volume 2 include: Sol-gel technology is a versatile technology, making it possible to produce a wide variety of materials and to provide existing substances with novel properties. This technology was applied to producingnovel materials, for example organic-inorganic hybrids, which are quite difficult to make by other fabricating techniques, and it was also applied to producing materials based on high temperature superconducting oxides. "Applications of Sol-Gel Technology," (Volume 3), will cover applications such as:
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Organic Nanostructured Thin Film Devices and Coatings for Clean Energy

Author: Sam Zhang

Publisher: CRC Press

ISBN: 1420093940

Category: Technology & Engineering

Page: 254

View: 9204

Authored by leading experts from around the world, the three-volume Handbook of Nanostructured Thin Films and Coatings gives scientific researchers and product engineers a resource as dynamic and flexible as the field itself. The first two volumes cover the latest research and application of the mechanical and functional properties of thin films and coatings, while the third volume explores the cutting-edge organic nanostructured devices used to produce clean energy. This third volume, Organic Nanostructured Thin Film Devices and Coatings for Clean Energy, addresses various aspects of the processing and properties of organic thin films, devices, and coatings for clean energy applications. Topics covered include: Thin-film solar cells based on the use of polycrystalline thin-film materials Anodized titania nanotube array and its application in dye-sensitized solar cells Progress and challenges associated with photovoltaic applications of silicon nanocrystalline materials Semiconductive nanocomposite films for clean environment Thin-coating technologies and applications in high-temperature solid oxide fuel cells Nanoscale organic molecular thin films for information memory applications A complete resource, this handbook provides the detailed explanations that newcomers need, as well as the latest cutting-edge research and data for experts. Covering a wide range of mechanical and functional technologies, including those used in clean energy, these books also feature figures, tables, and images that will aid research and help professionals acquire and maintain a solid grasp of this burgeoning field. The Handbook of Nanostructured Thin Films and Coatings is composed of this volume and two others: Nanostructured Thin Films and Coatings, Functional Properties Nanostructured Thin Films and Coatings, Mechanical Properties
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Nanostructured Thin Films and Coatings

Functional Properties

Author: Sam Zhang

Publisher: CRC Press

ISBN: 1420093975

Category: Technology & Engineering

Page: 422

View: 1270

Authored by leading experts from around the world, the three-volume Handbook of Nanostructured Thin Films and Coatings gives scientific researchers and product engineers a resource as dynamic and flexible as the field itself. The first two volumes cover the latest research and application of the mechanical and functional properties of thin films and coatings, while the third volume explores the cutting-edge organic nanostructured devices used to produce clean energy. This second volume, Nanostructured Thin Films and Coatings: Functional Properties, focuses on functional properties (i.e., optical, electronic, and electrical) and related devices and applications. It also addresses topics such as: Large-scale fabrication of functional thin films using nanoarchitecture via chemical routes Fabrication and characterization of SiC nanostructured/nanocomposite films Low-dimensional nanocomposite fabrication and its applications Optical and optoelectronic properties of silicon nanocrystals embedded in SiO2 matrix Electrical properties of silicon nanocrystals embedded in amorphous SiO2 matrix Optical aspects of properties and applications of sol-gel-derived nanostructured thin films Controllably micro/nanostructured films and devices Thin-film shape memory alloy for microsystem applications A complete resource, this handbook provides the detailed explanations that newcomers need, as well as the latest cutting-edge research and data for experts. Covering a wide range of mechanical and functional technologies, including those used in clean energy, these books also feature figures, tables, and images that will aid research and help professionals acquire and maintain a solid grasp of this burgeoning field. The Handbook of Nanostructured Thin Films and Coatings is composed of this volume and two others: Nanostructured Thin Films and Coatings: Mechanical Properties Organic Nanostructured Thin Film Devices and Coatings for Clean Energy
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Beam Technologies for Integrated Processing

Author: National Research Council,Division on Engineering and Physical Sciences,National Materials Advisory Board,Commission on Engineering and Technical Systems,Committee on Beam Technologies: Opportunities in Attaining Fully Integrated Processing Systems

Publisher: National Academies Press

ISBN: 0309046351

Category: Technology & Engineering

Page: 106

View: 9005

Beam technologies play an important role in microelectronic component fabrication and offer opportunities for application in other manufacturing schemes. Emerging beam technologies that incorporate potential for sensors, control, and information processing have created new opportunities for integrated processing of materials and components. This volume identifies various beam technologies and their applications in electronics and other potential manufacturing processes. Recommendations for research and development to enhance the understanding, capabilities, and applications of beam technologies are presented.
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Coating Materials for Electronic Applications

Polymers, Processing, Reliability, Testing

Author: James J. Licari

Publisher: William Andrew

ISBN: 0815516479

Category: Technology & Engineering

Page: 545

View: 8520

This first book in the Materials and Processes for Electronics Applications series answers questions vital to the successful design and manufacturing of electronic components, modules, and systems such as: - How can one protect electronic assemblies from prolonged high humidity, high temperatures, salt spray or other terrestrial and space environments? - What coating types can be used to protect microelectronics in military, space, automotive, or medical environments? - How can the chemistry of polymers be correlated to desirable physical and electrical properties? - How can a design engineer avoid subsequent potential failures due to corrosion, metal migration, electrical degradation, outgassing? - What are the best processes that manufacturing can use to mask, clean, prepare the surface, dispense the coating, and cure the coating? - What quality assurance and in-process tests can be used to assure reliability? - What government or industry specifications are available? - How can organic coatings be selected to meet OSHA, EPA, and other regulations? Besides a discussion of the traditional roles of coatings for moisture and environmental protection of printed circuit assemblies, this book covers dielectric coatings that provide electrical functions such as the low-dielectric-constant dielectrics used to fabricate multilayer interconnect substrates and high-frequency, high-speed circuits. Materials engineers and chemists will benefit greatly from a chapter on the chemistry and properties of the main types of polymer coatings including: Epoxies, Polyimides, Silicones, Polyurethanes, Parylene, Benzocyclobenzene and many others. For manufacturing personnel, there is an entire chapter of over a dozen processes for masking, cleaning, and surface preparation and a comprehensive review of over 20 processes for the application and curing of coatings including recent extrusion, meniscus, and curtain coating methods used in processing large panels. The pros and cons of each method are given to aid the engineer in selecting the optimum method for his/her application. As a bonus, from his own experience, the author discusses some caveats that will help reduce costs and avoid failures. Finally, the author discusses regulations of OSHA, EPA, and other government agencies which have resulted in formulation changes to meet VOC and toxicity requirements. Tables of numerous military, commercial, industry, and NASA specifications are given to help the engineer select the proper callout.
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Handbook of Physical Vapor Deposition (PVD) Processing

Author: Donald M. Mattox

Publisher: William Andrew

ISBN: 0815520387

Category: Technology & Engineering

Page: 792

View: 7013

This updated version of the popular handbook further explains all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the new edition remains on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications, with additional information to support the original material. The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called "war stories", to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired. The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. The discussion of transferring technology between R&D and manufacturing provided in Appendix 1, will be of special interest to the manager or engineer responsible for moving a PVD product and process from R&D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language. Fully revised and updated to include the latest developments in PVD process technology ‘War stories’ drawn from the author’s extensive experience emphasize important points in development and manufacturing Appendices include listings of periodicals and professional societies, terms and acronyms, and material on transferring technology between R&D and manufacturing
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Thin Film Processes II

Author: John L. Vossen,Werner Kern

Publisher: Gulf Professional Publishing

ISBN: 9780127282510

Category: Science

Page: 866

View: 1725

This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to the literature. Though edited to stand alone, when taken together, Thin Film Processes II and its predecessor present a thorough grounding in modern thin film techniques. Key Features * Provides an all-new sequel to the 1978 classic, Thin Film Processes * Introduces new topics, and several key topics presented in the original volume are updated * Emphasizes practical applications of major thin film deposition and etching processes * Helps readers find the appropriate technology for a particular application
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Handbook of thin-film deposition processes and techniques

principles, methods, equipment, and applications

Author: Klaus K. Schuegraf

Publisher: Noyes Data Corporation/Noyes Publications

ISBN: N.A

Category: Technology & Engineering

Page: 413

View: 7242

The most recent developments and techniques in thin film deposition for high technology applications are described by 23 authorities in the field.
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Mechanical Alloying

For Fabrication of Advanced Engineering Materials

Author: M. Sherif El-Eskandarany

Publisher: William Andrew

ISBN: 0815518242

Category: Technology & Engineering

Page: 257

View: 3043

Unique in bringing about a solid-state reaction at room temperature, mechanical alloying produces powders and compounds difficult or impossible to obtain by conventional techniques. Immediate and cost-effective industry applications of the resultant advanced materials are in cutting tools and high performance aerospace products such as metal matrix armor and turbine blades. The book is a guided introduction to mechanical alloying, covering material requirements equipment, processing, and engineering properties and characteristics of the milled powders. Chapters 3 and 4 treat the fabrication of nanophase materials and nanophase composite materials. Chapter 8 provides extensive coverage of metallic glass substances. This book is ideal for materials scientists in industry and in research, design, processing, and plant engineers in the cutting tools and aerospace industries as well as senior level students in metallurgical and mechanical materials engineering. The book will especially benefit metallurgists unacquainted with ball milling fabrication.
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Handbook of Chemical Vapor Deposition

Principles, Technology and Applications

Author: Hugh O. Pierson

Publisher: William Andrew

ISBN: 0815517432

Category: Technology & Engineering

Page: 506

View: 6933

Turn to this new second edition for an understanding of the latest advances in the chemical vapor deposition (CVD) process. CVD technology has recently grown at a rapid rate, and the number and scope of its applications and their impact on the market have increased considerably. The market is now estimated to be at least double that of a mere seven years ago when the first edition of this book was published. The second edition is an update with a considerably expanded and revised scope. Plasma CVD and metallo-organic CVD are two major factors in this rapid growth. Readers will find the latest data on both processes in this volume. Likewise, the book explains the growing importance of CVD in production of semiconductor and related applications.
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Engineered Materials Handbook: Ceramics and glasses

Author: ASM International. Handbook Committee

Publisher: CRC

ISBN: N.A

Category: Technology & Engineering

Page: 1217

View: 9016

CERAMIC & GLASSES is the work of more than 400 contributing authors & reviewers from 12 countries. This volume provides comprehensive information on processing, properties, testing & characterization, design, failure analysis & applications of various types of ceramics & glasses. The emphasis is on practical information that will be helpful for working engineers, technicians, researchers, educators, & students. Coverage ranges from bricks to superconductors, windows to data transmission lines. Contents include 170 articles divided into 15 major sections: Introduction *Ceramic Powders & Processing; *Forming & Predensification, & Nontraditional Densification Processes; Firing/Sintering: Densification, *Final Shaping & Surface Finishing; Glass Processing; Joining; Testing; Characterization; & NDE; *Failure Analysis; Design Considerations; Properties; Application for Traditional Ceramics; Structural Applications for Technical, Engineering, & Advanced Ceramics. Published by ASM International, Materials Park, OH 44073.
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