Handbook of Deposition Technologies for Films and Coatings

Science, Applications and Technology

Author: Peter M. Martin

Publisher: William Andrew

ISBN: 0815520328

Category: Technology & Engineering

Page: 936

View: 6164

This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. Extensive material was added throughout the book, especially in the areas concerned with plasma-assisted vapor deposition processes and metallurgical coating applications. * Explains in depth the many recent i
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Handbook of Deposition Technologies for Films and Coatings, 2nd Ed.

Science, Applications and Technology

Author: Rointan F. Bunshah

Publisher: William Andrew

ISBN: 0815517467

Category: Technology & Engineering

Page: 887

View: 9537

This second edition, edited by the world-renowned Dr. Rointain Bunshah, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. Considerably more material was added in Plasma Assisted Vapor Deposition processes, as well as Metallurgical Coating Applications.
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Handbook of Deposition Technologies for Films and Coatings

Science, Technology, and Applications

Author: Rointan Framroze Bunshah

Publisher: William Andrew

ISBN: 0815513372

Category: Reference

Page: 861

View: 8719

This second edition, edited by the world-renowned Dr. Rointain Bunshah, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. Considerably more material was added in Plasma Assisted Vapor Deposition processes, as well as Metallurgical Coating Applications.
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Handbook of Thin Film Technology

Author: Hartmut Frey,Hamid R Khan

Publisher: Springer Science & Business Media

ISBN: 3642054307

Category: Technology & Engineering

Page: 380

View: 9652

“Handbook of Thin Film Technology” covers all aspects of coatings preparation, characterization and applications. Different deposition techniques based on vacuum and plasma processes are presented. Methods of surface and thin film analysis including coating thickness, structural, optical, electrical, mechanical and magnetic properties of films are detailed described. The several applications of thin coatings and a special chapter focusing on nanoparticle-based films can be found in this handbook. A complete reference for students and professionals interested in the science and technology of thin films.
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Handbook of Thin Film Deposition

Techniques, Processes, and Technologies

Author: Krishna Seshan

Publisher: William Andrew

ISBN: 1437778739

Category: Technology & Engineering

Page: 392

View: 6971

Resumen: The 2nd edition contains new chapters on contamination and contamination control that describe the basics and the issues. Another new chapter on meteorology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together physical vapor deposition techniques. Two entirely new areas are focused on: chemical mechanical polishing, which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials.
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Handbook of thin-film deposition processes and techniques

principles, methods, equipment, and applications

Author: Klaus K. Schuegraf

Publisher: Noyes Data Corporation/Noyes Publications

ISBN: N.A

Category: Technology & Engineering

Page: 413

View: 9803

The most recent developments and techniques in thin film deposition for high technology applications are described by 23 authorities in the field.
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Handbook of Sputter Deposition Technology

Fundamentals and Applications for Functional Thin Films, Nano-materials and MEMS

Author: Kiyotaka Wasa,Isaku Kanno,Hidetoshi Kotera

Publisher: William Andrew

ISBN: 1437734839

Category: Science

Page: 644

View: 907

Sputtering is a Physical Vapor Deposition vacuum process used to deposit very thin films onto a substrate for a wide variety of commercial and scientific purposes. Sputtering occurs when an ionized gas molecule is used to displace atoms of a specific material. These atoms then bond at the atomic level to a substrate and create a thin film. Several types of sputtering processes exist, including: ion beam, diode, and magnetron sputtering. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallic coatings. High temperature, diamond films and ferroelectric materials are other applications. Sputtering applications are important across a wide range of industries, including the automotive, medical, semiconductors, space, plastics, and military sectors. A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available. All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique. 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere.
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Organic Nanostructured Thin Film Devices and Coatings for Clean Energy

Author: Sam Zhang

Publisher: CRC Press

ISBN: N.A

Category: Technology & Engineering

Page: 254

View: 1552

Authored by leading experts from around the world, the three-volume Handbook of Nanostructured Thin Films and Coatings gives scientific researchers and product engineers a resource as dynamic and flexible as the field itself. The first two volumes cover the latest research and application of the mechanical and functional properties of thin films and coatings, while the third volume explores the cutting-edge organic nanostructured devices used to produce clean energy. This third volume, Organic Nanostructured Thin Film Devices and Coatings for Clean Energy, addresses various aspects of the processing and properties of organic thin films, devices, and coatings for clean energy applications. Topics covered include: Thin-film solar cells based on the use of polycrystalline thin-film materials Anodized titania nanotube array and its application in dye-sensitized solar cells Progress and challenges associated with photovoltaic applications of silicon nanocrystalline materials Semiconductive nanocomposite films for clean environment Thin-coating technologies and applications in high-temperature solid oxide fuel cells Nanoscale organic molecular thin films for information memory applications A complete resource, this handbook provides the detailed explanations that newcomers need, as well as the latest cutting-edge research and data for experts. Covering a wide range of mechanical and functional technologies, including those used in clean energy, these books also feature figures, tables, and images that will aid research and help professionals acquire and maintain a solid grasp of this burgeoning field. The Handbook of Nanostructured Thin Films and Coatings is composed of this volume and two others: Nanostructured Thin Films and Coatings, Functional Properties Nanostructured Thin Films and Coatings, Mechanical Properties
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Handbook of Industrial Refractories Technology

Principles, Types, Properties and Applications

Author: Stephen Caniglia,Gordon L. Barna

Publisher: William Andrew

ISBN: 0815517564

Category: Technology & Engineering

Page: 650

View: 5147

Encompasses the entire range of industrial refractory materials and forms: properties and their measurement, applications, manufacturing, installation and maintenance techniques, quality assurance, and statistical process control.
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Handbook of Hard Coatings

Deposition Technologies, Properties and Applications

Author: Rointan Framroze Bunshah

Publisher: Cambridge University Press

ISBN: 9780815514381

Category: Technology & Engineering

Page: 550

View: 4273

Written by 12 leading experts, this is an essential resource for fabrication, characterization and applications in the field of hard coatings and wear resistant surfaces. Offering complete explanations of commercially oriented deposition technology, from traditional vacuum. Includes a detailed introduction to the science of characterizing and measuring hard coatings.
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Semiconductor Manufacturing Handbook, Second Edition

Author: Hwaiyu Geng

Publisher: McGraw Hill Professional

ISBN: 1259583120

Category: Technology & Engineering

Page: 704

View: 1515

Thoroughly Revised, State-of-the-Art Semiconductor Design, Manufacturing, and Operations Information Written by 70 international experts and reviewed by a seasoned technical advisory board, this fully updated resource clearly explains the cutting-edge processes used in the design and fabrication of IC chips, MEMS, sensors, and other electronic devices. Semiconductor Manufacturing Handbook, Second Edition, covers the emerging technologies that enable the Internet of Things, the Industrial Internet of Things, data analytics, artificial intelligence, augmented reality, and and smart manufacturing. You will get complete details on semiconductor fundamentals, front- and back-end processes, nanotechnology, photovoltaics, gases and chemicals, fab yield, and operations and facilities. •Nanotechnology and microsystems manufacturing •FinFET and nanoscale silicide formation •Physical design for high-performance, low-power 3D circuits •Epitaxi, anneals, RTP, and oxidation •Microlithography, etching, and ion implantations •Physical, chemical, electrochemical, and atomic layer vapor deposition •Chemical mechanical planarization •Atomic force metrology •Packaging, bonding, and interconnects •Flexible hybrid electronics •Flat-panel,flexible display electronics, and photovoltaics •Gas distribution systems •Ultrapure water and filtration •Process chemicals handling and abatement •Chemical and slurry handling systems •Yield management, CIM, and factory automation •Manufacturing execution systems •Advanced process control •Airborne molecular contamination •ESD controls in clean-room environments •Vacuum systems and RF plasma systems •IC manufacturing parts cleaning technology •Vibration and noise design •And much more
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Nanostructured Thin Films and Coatings

Mechanical Properties

Author: Sam Zhang

Publisher: CRC Press

ISBN: 9781420094022

Category: Technology & Engineering

Page: 550

View: 5496

Authored by leading experts from around the world, the three-volume Handbook of Nanostructured Thin Films and Coatings gives scientific researchers and product engineers a resource as dynamic and flexible as the field itself. The first two volumes cover the latest research and application of the mechanical and functional properties of thin films and coatings, while the third volume explores the cutting-edge organic nanostructured devices used to produce clean energy. This first volume, Nanostructured Thin Films and Coatings: Mechanical Properties, concentrates on essential properties such as hardness, toughness, and adhesion. It looks at process and performance and offers a detailed analysis of theories and size effect. It also covers: Fundamentals of hard and superhard nanocomposites and heterostructures Determination of hardness and modulus of thin films Fracture toughness and interfacial adhesion strength of thin films: Indentation and scratch experiments and analysis Toughness and toughening of hard nanocomposite coatings Processing and mechanical properties of hybrid sol-gel-derived nanocomposite coatings Use of nanomechanics to optimize coatings for cutting tools Electrolytic deposition of nanocomposite coatings: Processing, properties, and applications This book presents an industrial perspective on diamond and metal-containing amorphous carbon nanostructured coatings and transition metal nitride-based nanolayered and nanocomposite coatings. It also covers polymer films, from nanoscale synthesis to macroscale functionality. A complete resource, this handbook provides the detailed explanations that newcomers need, as well as the latest cutting-edge research and data for experts. Covering a wide range of mechanical and functional technologies, including those used in clean energy, these books also feature figures, tables, and images that will aid research and help professionals acquire and maintain a solid grasp of this burgeoning field. The Handbook of Nanostructured Thin Films and Coatings is composed of this volume and two others: Nanostructured Thin Films and Coatings: Functional Properties Organic Nanostructured Thin Film Devices and Coatings for Clean Energy
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Handbook of VLSI Microlithography

Principles, Technology and Applications

Author: William B. Glendinning,John N. Helbert

Publisher: William Andrew

ISBN: 1437728227

Category: Technology & Engineering

Page: 671

View: 3253

This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings-- including optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry. The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line edge and pattern feature dimension control. The book's explanation of resist and resist process equipment technology may well be the first practical description of the relationship between the resist process and equipment parameters. The basics of resist technology are completely covered -- including an entire chapter on resist process defectivity and the potential yield limiting effect on device production. Each alternative lithographic technique and testing method is considered and evaluated: basic metrology including optical, scanning-electron-microscope (SEM) techniques and electrical test devices, along with explanations of actual printing tools and their design, construction and performance. The editor devotes an entire chapter to today's sophisticated, complex electron-beam printers, and to the emerging x-ray printing technology now used in high-density CMOS devices. Energetic ion particle printing is a controllable, steerable technology that does not rely on resist, and occupies a final section of the handbook.
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Handbook of sol-gel science and technology. 3. Applications of sol-gel technology

Author: Sumio Sakka

Publisher: Springer Science & Business Media

ISBN: 9781402079689

Category: Ceramic materials

Page: 791

View: 1327

Since Dr. Disiich of Germany prepared a glass lens by the sol-gel method around 1970, sol-gel science and technology has continued to develop. Since then this field has seen remarkable technical developments as well as a broadening of the applications of sol-gel science and technology. There is a growing need for a comprehensive reference that treats both the fundamentals and the applications, and this is the aim of "Handbook of Sol-Gel Science and Technology."The primary purpose of sol-gel science and technology is to produce materials, active and non-active including optical, electronic, chemical, sensor, bio- and structural materials. This means that sol-gel science and technology is related to all kinds of manufacturing industries. Thus Volume 1, "Sol-Gel Processing," is devoted to general aspects of processing. Newly developed materials such as organic-inorganic hybrids, photonic crystals, ferroelectric coatings, photocatalysts will be covered. Topics in this volume include: Volume 2, "Characterization of Sol-Gel Materials and Products, "highlights the important fact that useful materials are only produced when characterization is tied to processing. Furthermore, characterization is essential to the understanding of nanostructured materials, and sol-gel technology is a most important technology in this new field. Since nanomaterials display their functional property based on their nano- and micro-structure, "characterization" is very important. Topics found in Volume 2 include: Sol-gel technology is a versatile technology, making it possible to produce a wide variety of materials and to provide existing substances with novel properties. This technology was applied to producingnovel materials, for example organic-inorganic hybrids, which are quite difficult to make by other fabricating techniques, and it was also applied to producing materials based on high temperature superconducting oxides. "Applications of Sol-Gel Technology," (Volume 3), will cover applications such as:
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Thin film materials technology

sputtering of control compound materials

Author: Kiyotaka Wasa,Makoto Kitabatake,Hideaki Adachi

Publisher: Springer Science & Business Media

ISBN: 9783540211181

Category: Technology & Engineering

Page: 518

View: 9402

This title contains rich historical coverage of the basics and new experimental and technological information about ceramic thin film and large-area functional coating. Included are principles and examples of making thin-film materials and devices.
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Handbook of Physical Vapor Deposition (PVD) Processing

Author: Donald M. Mattox

Publisher: William Andrew

ISBN: 0815520387

Category: Technology & Engineering

Page: 792

View: 6403

This updated version of the popular handbook further explains all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the new edition remains on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications, with additional information to support the original material. The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called "war stories", to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired. The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. The discussion of transferring technology between R&D and manufacturing provided in Appendix 1, will be of special interest to the manager or engineer responsible for moving a PVD product and process from R&D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language. Fully revised and updated to include the latest developments in PVD process technology ‘War stories’ drawn from the author’s extensive experience emphasize important points in development and manufacturing Appendices include listings of periodicals and professional societies, terms and acronyms, and material on transferring technology between R&D and manufacturing
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Advances in powder metallurgy & particulate materials - 2005

proceedings of the 2005 International Conference on Powder Metallurgy & Particulate Materials : PM2TEC 2005, June 19-23, MPIF Montreal

Author: Metal Powder Industries Federation

Publisher: N.A

ISBN: 9780976205722

Category: Powder metallurgy

Page: N.A

View: 1956

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Periodical Title Abbreviations

By Title

Author: Gale Group

Publisher: Gale / Cengage Learning

ISBN: N.A

Category: Reference

Page: 1418

View: 2712

This fully revised and expanded edition decodes more than 145,000 different abbreviations for periodical titles and selected monographs in all fields. Nearly 15,000 new entries were added since the previous edition. Volume 1 lists, in a single alphabetical sequence, abbreviations commonly used for periodicals together with their full titles. Volume 2 is arranged alphabetically by periodical title, rather than by abbreviation.
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